POLISHING SHEET, SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLISHING METHOD
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机译:抛光片,基体抛光装置和基体抛光方法
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摘要
substrate polishing concept ( apparatus and method ) is disclosed , the polishing surface of the polishing sheet by a drive device driven in the linear direction, the surface of the substrate is held on the polishing surface of the polishing sheet by a polishing head , the substrate is checked through the polishing sheet by a monitoring system .
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