METHOD FOR CONTROLLING SYNCHROTRON GRAZING INCIDENCE X-RAY SCATTERING APPARATUS

摘要

For easy control of the temperature of a sample as well as for precise control of an incident angle of a synchrotron X-ray beam, the present invention provides a method for controlling a synchrotron grazing incidence X-ray scattering apparatus, which comprises a step initializing a sample control section and a temperature control section; a step of aligning a vacuum sample chamber by driving a stepping motor drive of the sample control section, a step of compensating the incident angle of the synchrotron X-ray beam with respect to the sample by driving the goniometer drive of the sample control section, and a step of controlling the temperature of a sample stage where the sample is seated by controlling the temperature control section.