PARTICLE ADSORPTION CHAMBER AND PARTICLE SAMPLING APPARATUS AND PARTICLE SAMPLING METHOD

摘要

The present invention relates to particle adsorption chamber, the particle sampling apparatus, and a particle sampling method, the body can hold a sucker of particles to adsorb, is installed inside the body interior of a support portion for supporting the suction plates, said body using the cover, the particle adsorption chamber containing the porous plate to stabilize the stream of air flowing into the interior of the body to seal and characterized in that the adsorption particles. With this structure, it is possible not only by size measurement of the particle number can analyze even the shape and components of particles. Accordingly, it is possible to trace the cause of the particle analysis. ; Semiconductor, cleanliness, GAST pumps, sampling, particle counter