HYBRID UV IMPRINTING MOLD WITH SHADOW MASKING FUNCTION AND MANUFACTURING METHOD THEREOF, AND METHOD FOR FORMING PATTERN ON SUBSTRATE BY USING IT

摘要

A hybrid UV(UltraViolet) imprinting mold with a shadow masking function and a manufacturing method thereof, and a pattern forming method using the same are provided to simplify manufacturing processes and to improve productivity. A hybrid UV imprinting mold with a shadow masking function includes a mold support body(202), a light shielding layer, an adhesiveness reinforcing layer, and a thermal setting mold resin layer. The light shielding layer is formed on the mold support body. The adhesiveness reinforcing layer(206) is formed on the entire surface of the mold support body including the light shielding layer. An UV or thermal setting mold resin layer(210a) is formed on the adhesiveness reinforcing layer.