TRANSPARENT CONDUCTIVE OXIDE THIN FILM DEPOSITED WITH BUFFER LAYER ON POLYMER SUBSTRATE AND ITS PREPARATION

摘要

A transparent conductive oxide thin film deposited with a buffer layer on a polymer substrate and a manufacturing method thereof are provided to improve instability of the polymer substrate by controlling a thickness of a ZnO buffer layer to reduce diffusion of vapor and oxygen. A ZnO buffer layer is deposited on a polymer substrate. A ZnO thin film doped with Ga is deposited on the Zno buffer layer. The polymer substrate is selected from PET(polyethylene terephtalate), PEN(polyethylene naphthalate), PPA(polypropylene adipate), and PI(polyisocyanate). A thickness of the ZnO buffer layer is 10 nm to 300 nm, or 60 nm to 150 nm.