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TOPOLOGY SIMULATION SYSTEM, TOPOLOGY SIMULATION METHOD, AND RECORDING MEDIUM
TOPOLOGY SIMULATION SYSTEM, TOPOLOGY SIMULATION METHOD, AND RECORDING MEDIUM
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机译:拓扑模拟系统,拓扑模拟方法和记录介质
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摘要
A matrix computing unit evaluates visual properties influenced by a positional relationship between surface elements of an element so that a shading effect and a re-deposition effect are reflected to the simulation results. A beam condition computing unit calculates beam conditions according to a position of the element on a wafer so that a difference in machined topologies caused by a positional difference on the wafer is reflected to the simulation results.
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