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METHOD FOR FABRICATING THE NANOROD BY AAO TEMPLATE AND THE NANOROD USING THE METHOD
METHOD FOR FABRICATING THE NANOROD BY AAO TEMPLATE AND THE NANOROD USING THE METHOD
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机译:AAO模板制造纳米的方法及使用该方法的纳米
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摘要
A method for fabricating nano rods using AAO template and the nano rod achieved by the same are provided to shorten a growth time of the nano rod by implementing DC electroplate. A seed metal(22) is deposited on a surface of an anodized portion(15) with nano-sized pores(20) in one side of AAO(Anodic Aluminum Oxide) template, and then is electroplated to form a substrate metal. The aluminum substrate is etched, except for the substrate metal and the anodized portion. A barrier layer(32) forming a lower end of the pores is removed to open the pores. The pores are immersed in an electroplating solution to fill the pores with metal. The anodized portion is etched to expose nano metals formed in pores.
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