PLASMA REACTOR WITH MULTI ARRAYED DISCHARGING CHAMBER AND ATMOSPHERIC PRESSURE PLASMA PROCESSING SYSTEM USING THE SAME

摘要

A plasma reactor having a multi arrayed discharge chamber and an atmospheric pressure plasma processing system are provided to generate uniformly plasma in a large sized range by increasing the number and length of the discharge chamber. A plasma reactor includes a reactor body(110) with a plurality of discharging chambers, a plasma spray slit, a transformer, a core protection tube and a first power supply source. The plasma spray slit is formed at the reactor body along the plurality of discharging chambers. The transformer(120) includes a magnetic core and a primary winding connected to the discharging chambers. The first power supply source is electrically connected to the primary winding. The current of the primary winding is driven by the first power supply source. The driving current of the primary winding is used for completing a secondary circuit of the transformer, so that an inductively coupled plasma is generated to induce an AC potential in each discharging chamber and to enclose an outer portion of the core protection tube.