laser induced thermal imaging apparatus, laser induced thermal imaging method using the apparatus and fabrication method of OLED using the apparatus

摘要

A laser induced thermal imaging apparatus, a laser induced thermal imaging method using the same and a method for fabricating an OLED using the same are provided to obtain a high imaging pattern profile by irradiating a laser beam on a sufficiently laminated donor film. A laser induced thermal imaging apparatus includes a chuck(115), a lamination unit(150), and a laser irradiating apparatus(130). The chuck(115) fixes an accepter substrate(50). The lamination unit(150) is placed on the chuck(115), and includes a body unit which includes an upper plate(152) and a lower plate(151), and a pressing unit(154) which is connected to the body unit, and laminates a donor film(70), which is placed between the upper plate(152) and the lower plate(151), on the accepter substrate(50). The laser irradiating apparatus(130) is placed at the upper part of the lamination unit(150), penetrates the lamination unit(150), and irradiates a laser beam on the laminated donor film(70).