METHOD FOR APPLYING ELECTROCONDUCTING NANO-COMPOSITE COATINGS CONTAINING METAL IN SILICON-CARBON MATRIX

摘要

FIELD: microelectronics, possibly application of nano-composite coatings with predetermined conductivity.;SUBSTANCE: method comprises steps of creating in vacuum chamber with use of plasmotron flux of plasma of vapor of silicon-containing liquid hydrocarbon at presence of argon with partial pressure exceeding by three times and more partial pressure of vapor of silicon-containing liquid hydrocarbon and also creating flux of metal particles with use of magnetron; depositing coating onto substrate holder carrying substrate and made with possibility of insulation from flux of metal particles. Intensity values of fluxes of metal particles and of plasma of vapor of silicon containing liquid hydrocarbon are selected according to condition providing partial volume of deposited metal 25 - 54 vol. % in the total volume of coating. Different siloxanes or their mixtures with hydrocarbons are used as silicon-containing liquid hydrocarbon. As source of alloy metal may be used any metal selected among metals non- forming carbides or metal whose carbide features high conductivity. Before deposition step surface of substrate holder is subjected to cleaning by means of argon ions. Surface of substrate holder is isolated from metal particle fluxes due to shielding it by means of shutter.;EFFECT: lowered elastic stresses in coating and therefore improved adhesion of coating to substrate, enhanced thermal resistance of coating.;5 cl, 7 ex