首页> 外国专利> Structured semiconductor chip, for use with electronic component, has passivation layer made of silicon carbide comprising high breaking point/tensile strength, where layer is provided on silicon oxide layer

Structured semiconductor chip, for use with electronic component, has passivation layer made of silicon carbide comprising high breaking point/tensile strength, where layer is provided on silicon oxide layer

机译:用于电子元件的结构化半导体芯片具有由具有高断裂点/拉伸强度的碳化硅制成的钝化层,其中该层设置在氧化硅层上

摘要

The chip has an intermediate oxide layer (1) formed between an upper conductor consisting of aluminum and a lower conductor, and a silicon oxide layer (3) provided on the intermediate oxide layer (1) and the upper conductor (2). A passivation layer (5) made of silicon carbide having high breaking point/tensile strength is provided on the silicon oxide layer, where the thickness of the passivation layer is 100-1,000 nanometer.
机译:该芯片具有形成在由铝组成的上导体和下导体之间的中间氧化物层(1)以及设置在中间氧化物层(1)和上导体(2)上的氧化硅层(3)。由具有高断裂点/拉伸强度的碳化硅制成的钝化层(5)设置在氧化硅层上,其中钝化层的厚度为100-1,000纳米。

著录项

  • 公开/公告号DE102005020806A1

    专利类型

  • 公开/公告日2006-11-23

    原文格式PDF

  • 申请/专利权人 INFINEON TECHNOLOGIES AG;

    申请/专利号DE20051020806

  • 申请日2005-05-04

  • 分类号H01L23/28;H01L23/485;H01L23/522;

  • 国家 DE

  • 入库时间 2022-08-21 20:30:02

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