Sound generation and emission method for cleaning articles immersed in fluid involves generating signals that are modulated according to frequency or intensity

摘要

A generator (2) produces frequency-dependent signals that are transmitted to at least one sound generator (4) that emits sound waves to fluid (6) in which articles e.g. wafer (7) are immersed. The fluid may be an aqueous solution, condensed gases or gas solution mixtures. The signals are modulated based on the frequency or intensity.