Method for predicting surface abrasion e.g. of wafers, involves surface of body carrying out movements relative to further body

摘要

A method for automatic prediction of abrasion, has a starting contour (7) the surface of which is determined prior to the first relative movement. Location-dependent physical loading of the surface, and location-dependent abrasion undergone by the surface, are calculated and the surface of the body (K) carries out a further relative movement, and between the two surfaces a gap is formed. The width of the gap is ascertained and during the second relative movement, the gap is filled with fluid, where at least one physical property of the fluid is determined. For each relative movement, a sequence is carried out and simulated, involving location-dependent physical loading of the surface being calculated (S2), and an abrasive calculation (S3) and a contour calculation (S4) to determine the contour. Independent claims are included for the following: (A) A digital storage medium. (B) A computer program product for automatic prediction of wear. (C) A data processing installation. (D).