Calculation method e.g. for multiple spectrums of total reflection, involves measuring reflection spectrum of object and comparing it with computed model spectrum

摘要

The method involves measuring a reflection spectrum of an object and comparing it with a computed model spectrum. The model parameters of the model spectrum are varied, until the measured reflection spectrum agrees with the model spectrum and that a given agreement value is reached. The formula is divided in such a way that the computation of the total reflection of the model spectrum into partial formulas that with computation of further spectra with changed parameters only those partial formulas must again be computed, which have a changed parameter.