Projection illumination equipment for manufacturing semiconductor component, has cuboid shaped light conducting rod, and crystallographic main axis extending approximately perpendicular or parallel to longitudinal extension of rod

摘要

The equipment (1) has a light source producing polarized light, a illumination system (3) and a projection lens. The illumination system has a light conductor (20), which is formed of optical uniaxial crystal and designed as a cuboid shaped light conducting rod. A crystallographic main axis extends approximately perpendicular or approximately parallel to a longitudinal extension of the light conductor. The crystallographic main axis of the optical uniaxial crystal is oriented parallel to the outer surface of light conducting rod or approximately perpendicular to the larger longitudinal extension of the light conducting rod. An independent claim is also included for a light conductor for a light source.