Micromechanical micro pump for dosing medicine, has substrates connected with each other by anodic bonds, where one substrate is made up of silicone and includes unstructured side and connected with other substrate at unstructured side

摘要

The pump has substrates (110, 120) connected with each other by anodic bonds, and the substrate (120) is made up of silicone. The substrate has an unstructured side (121) and connected with the substrate (110) at the side. The substrate (110) is made up of glass and has input and output holes (112, 114). Recesses are inserted into the substrate (110) in such a manner that membranes (122, 124, 126) are created, and the membranes are moved by actuators (128). An independent claim is also included for a method of manufacturing a micro pump.