Exposure device for lithographic projects has electromagnetic trap in container for collecting neutral particles emitted during operation of radiation source by ionization arrangement ionizing neutral particles

摘要

The device has a container (10), a radiation source (12) in the container for radiating electromagnetic radiation of a defined wavelength, a reticle in the container, a substrate holder, a projection lens and an electromagnetic trap (20) in the container for collecting neutral particles emitted during operation of the radiation source by an ionization arrangement (30) ionizing the neutral particles. An independent claim is also included for a method of operating. an inventive device.