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Method for coating electrically insulating surfaces by CVD or PVD e.g. for materials research, involves forming micro-heating elements on ceramic substrate
Method for coating electrically insulating surfaces by CVD or PVD e.g. for materials research, involves forming micro-heating elements on ceramic substrate
A method for coating electrically insulating substrates by CVD or PVD, in which before the CVD- or PVD-coating process, micro-heating elements (2) are formed on a ceramic substrate (1) via/over which during the CVD- or PVD-coating process energy is released on the surface of the substrate to be coated. Independent claims are included for the following. (1) (A) A substrate coated by CVD or PVD and (2) (B) Application of substrates coated by CVD or PVD as micro-sensors or micro-actuators.
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