首页> 外国专利> Workpiece for use with cutting worktool, is made from silicon nitride substrate, and coating of diamond is provided at surface regions, where surface regions beneath diamond layer has gap density

Workpiece for use with cutting worktool, is made from silicon nitride substrate, and coating of diamond is provided at surface regions, where surface regions beneath diamond layer has gap density

机译:与切削工具一起使用的工件由氮化硅基底制成,并且在表面区域提供金刚石涂层,其中金刚石层下方的表面区域具有间隙密度

摘要

The workpiece is made from a silicon nitride substrate and a coating of diamond is provided at the surface regions. The surface region beneath the diamond layer has a gap density with a depth of 10 micrometer of the substrate, on which less than three gaps with length of more than 5 micrometer are provided on a length of 100 micrometer along an arbitrary aligned axis. An intermediate layer from silicon carbide is formed on the substrate surface between substrate and diamond coating. An independent claim is also included for a method of production of workpiece.
机译:工件由氮化硅衬底制成,并且在表面区域提供金刚石涂层。金刚石层下方的表面区域具有深度为基板的10微米的间隙密度,在其上沿着​​任意对准的轴在100微米的长度上提供了少于三个的长度大于5微米的间隙。在衬底和金刚石涂层之间的衬底表面上形成由碳化硅制成的中间层。还包括关于工件的制造方法的独立权利要求。

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