X-ray microscope for examining micro- and nanostructures comprises a condenser-monochromator arrangement in which a monochromatic radiation beam is condensed by means of a capillary optic unit

摘要

X-ray microscope comprises a condenser-monochromator arrangement in which a monochromatic radiation beam (4) is condensed by means of a capillary optic unit (3) with a circular aperture to a diameter of less than 0.1 mm at a fixed focal spot (7.1) a few millimeters behind the capillary optic unit, the object under examination (7) being placed in the plane of the focal spot.