Micromechanical component for pressure detection, has membrane structure with membrane that exhibits concave and convex sections on its outer edge, where piezo-resistor is arranged in region of convex section of outer edge of membrane

摘要

The component has a piezo-resistor arranged on a membrane structure for detecting membrane deformations. The piezo-resistor is planked in such a manner that a pressure-dependent output signal is produced. The membrane structure has a membrane (25), where an outer edge of the membrane exhibits concave and convex sections. The piezo-resistor is arranged in the region of the convex section of the outer edge of the membrane.