Disk-shaped units e.g. wafer, position correcting device for use in semiconductor industry, has signal processing unit calculating position variation of units by evaluating detection time periods determined during transportation of units

摘要

The device has multiple sensors (25) for determining the position of disk-shaped units (2, 3). A positioning device (11) positions a lifting device (18) to correct the relative position of the disk-shaped units on a conveying unit (29), where detection time periods are determined during the transportation of the disk-shaped units. An outer contour of the disk-shaped unit (3) penetrates into a detection area of the sensors at the detection time periods. A signal processing unit calculates a position variation of the disk-shaped units by evaluating the detection time periods. An independent claim is also included for a method for position correction of disc-shape units, which are transported using a conveying unit.