Gas discharge laser beam quality improving method for e.g. excimer laser-system, involves providing input temperature of tempering medium flowing through temperature duct with constant flow rate as actuating variable of control loop

摘要

The method involves circulating laser gas of a gas discharge laser system in a gas chamber (10), and guiding the laser gas to heat exchange surfaces (32) of a tempering medium duct (30) in the gas chamber. A tempering medium flows through the tempering duct with a constant flow rate, and the temperature of the laser gas is regulated as a control variable of a control loop during radiation operation. Input temperature of the tempering medium is provided as an actuating variable of the control loop. An independent claim is also included for a gas discharge laser system comprising a gas chamber.