Piezoelectric unit`s e.g. bulk acoustic wave resonator, structured base electrode producing method, involves providing base material, and producing laminated structure on base material, where structure has conductive material

摘要

The method involves providing a base material (100), and producing a laminated structure (133) on the base material, where the structure has a conductive material. A protective layer (140) is produced on the structure. A planarization layer is applied on the layer (140) and the base material. A section of the layer (140) is formed by structuring of the planarization layer, where the layers are laterally adjoined and form a planar surface. The layer (140) and an appropriate part of the planarization layer are removed in order to obtain a planar surface of the layers.