Trench wall surface`s surface area determining method for producing trench capacitor of memory cell, involves wetting surface of conductive layer of wall with aqueous conductive liquid, where electrodes are positioned in conductive liquid

摘要

The method involves wetting a surface (21) of a conductive layer (1) of a wall (31) with an aqueous conductive liquid (6). An electrode (7) is attached to a substrate (2). Electrodes (8, 9) are positioned in the aqueous conductive liquid, where the electrode (9) has a high internal resistance. A voltage is applied between the electrode (7) and the electrode (8). Another voltage applied between the electrode (7) and the electrode (9) is simultaneously measured.