Thermo-sensitive flow rate sensor unit for measuring e.g. flow velocity of fluid, has upper surface of one of two cavities arranged under temperature measuring resistor, where cavity is formed within section in which resistor is arranged

摘要

The unit has a carrier film (3) molded on a surface of a substrate (2), and a thermal resistor and a fluid temperature measuring resistor (5) produced from a thermo sensible resistance film. The two resistors are formed on the carrier film, and a cavity and another cavity (9b) are provided under the two resistors. The cavities are molded by the removal of parts of the substrate, and an upper surface of the cavity (9b) is arranged under the fluid resistor. The cavity (9b) is formed within a section in which the fluid resistor is arranged.