Divergence compensator for laser micro processing station comprises two or more tilted mirror systems each comprising three mirrors arranged in stepped formation

摘要

The divergence compensator comprises at least two tilted mirror systems each formed from three mirrors mounted in step formation. The laser micro processing station (1) comprises a UV laser with a wavelength of less than 200 nm, a beam forming device, a device for copying the laser beam onto the substrate being processed and a probe positioning system mounted in a processing chamber (5).The beam forming device can include a beam combiner.