Current supply for tube cathode in inline system, has chamber that is separated from vacuum chamber and exhibits pressure, which lies under atmospheric pressure, where supply is provided in chamber

摘要

The current supply has a chamber (16) that is separated from a vacuum chamber (2) and exhibits pressure, which lies under an atmospheric pressure, where the supply is provided in the chamber (16). A target carrier tube (11) is supported by supporting units in a wall. A sealing made of plastic is provided in proximity to the vacuum chamber. Another sealing that is distanced from the vacuum chamber comprises an electrical conducting material. The chamber (16) is connected with a pump via a gas supply.