Photo mask storing and utilizing device for lithographic projection, has container with gas inflow opening, which is arranged in such a manner that flushing gas scavenges photo mask with laminar flow in case of flushing of photo mask

摘要

The device has a container (30) accommodating a photo mask (5) with a container housing (32) and an opening device(34), which is closeably situated at the container housing for input and output of the photo mask. The container has a gas inflow opening (40), which is arranged in such a manner that a flushing gas scavenges the photo mask with a laminar flow in case of flushing of the photo mask. A protective foil for a gaseous material of the flushing gas is permeable to a volume.