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NANORO-ORIENTED ELECTRON MIXER AND METHOD OF USE THEREOF
NANORO-ORIENTED ELECTRON MIXER AND METHOD OF USE THEREOF
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机译:面向纳米的电子混合器及其使用方法
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摘要
A device that produces an electron beam with high optical quality for processing a sample, is presented. The optical quality is manifested by very high brightness and low energy spread. The device includes an electron source device comprising an electrode in the form of a shaped first layer, preferably in the form of a conducting crater carrying at least one nanotube, and an extracting electrode, which is formed with at least one aperture and is insulated from the firs layer. The source can be used in any column that requires such properties. The column according to the invention may be a full size or a miniature electron microscope, a lithography tool, a tool used for direct writing of wafers or a field emission display.
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