mikroaktuator, mikroaktuatorvorrichtung, optical switch and optical schaltanordnung

摘要

A plate (21) vertically movable with respect to substrate (11), is fixed to the substrate through flexure units (27a,27b). The electrodes (23a,23b) of the plate, generate an electrostatic force between the plate and substrate by voltage application. The plate is provided with a mirror (12) that is capable of moving into or back from an optical path. Independent claims are also included for the following: (1) micro-actuator device; (2) optical switch; and (3) optical switch array.