Deposition of silver or silver alloy nanoparticles on substrate comprises use of organometallic precursors and deposition carried out in presence of reactive oxidant gas

摘要

Coating a substrate with silver or silver alloy nanoparticles by chemical vapor deposition (CVD) uses at least one silver organometallic precursor and deposition carried out in the presence of a gas comprising at least 50% of a reactive oxidant gas selected from oxygen, carbon dioxide, ozone and mixtures of these. Coating a substrate with silver or silver alloy nanoparticles by chemical vapor deposition (CVD) uses at least one silver organometallic precursor and deposition carried out in the presence of a gas comprising at least 50%, preferably 70-100%, of a reactive oxidant gas selected from oxygen, carbon dioxide, ozone and mixtures of these. The gas can be a mixture of an oxidant gas and an inert gas such as argon, nitrogen, helium or mixtures of these, with the oxidant gas comprising more than 50% of the gas mixture. The silver alloy contains at least one element selected from other metals such as platinum, palladium, rhodium or iridium, and carbon, and the organometallic precursors are selected from carboxylates and beta-dicetonates of metals.