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A scanning device using a first optical system with a first focal length and a second optical system with a second focal length

机译:使用具有第一焦距的第一光学系统和具有第二焦距的第二光学系统的扫描装置

摘要

A scanning device which optically scans a surface along a scan line (14, fig. 1b). The scanning device comprises: a radiation source 2 such as a laser to illumination a scanning surface 6; a detection system 8 to detect radiation from the scanning surface and a deflection element 4 which has a scanning centre to scan radiation beam 12. A first optical system 5 with a first focal length f1 converges the radiation from deflection element to a scanning spot 13 and a second optical system 3 such as a parabolic mirror with a second focal length f2 converges radiation from the surface onto the detection system 8. The system is characterised in that the combination of the first optical system and the second optical system images the scanning centre onto the detection system. The combination of the first optical system and the second optical system may form a telescopic system. The detection system may comprise a plurality of detectors (17a-17d, fig. 2) which take radiation from the surface at different angles.
机译:一种沿扫描线光学扫描表面的扫描设备(图1b中的14)。扫描装置包括:辐射源2,例如激光,以照射扫描表面6;和检测系统8用于检测来自扫描表面的辐射,偏转系统4具有用于扫描辐射束12的扫描中心。第一光学系统5具有第一焦距f1,将来自偏转元件的辐射会聚到扫描点13和第二光学系统3,例如具有第二焦距f2的抛物面镜,将来自表面的辐射会聚到检测系统8上。该系统的特征在于,第一光学系统和第二光学系统的组合将扫描中心成像到检测系统。第一光学系统和第二光学系统的组合可以形成伸缩系统。该检测系统可以包括多个检测器(图2的17a-17d),其以不同角度从表面获取辐射。

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