Fault detection system and method based on weighted principal component analysis

摘要

A method and a system for performing a dynamic weighting technique for performing fault detection. The method comprises processing a workpiece (105) and performing a fault detection analysis relating to the processing of the workpiece (105). The method further comprises determining a relationship of a parameter relating to the fault detection analysis to a detected fault and adjusting a weighting associated with the parameter based upon the relationship of the parameter to the detected fault.