OBSERVATION DEVICE FOR ASSEMBLED STATUS OF COMPONENT AND OBSERVATION METHOD OF ASSEMBLED STATUS OF COMPONENT EMPLOYING IT

摘要

PPROBLEM TO BE SOLVED: To grasp behavior such as a state of void generation and the flow of resin or the like by observing the working parts of a substrate and a work upon connecting the workpiece to the substrate. PSOLUTION: The observation device has a stage 20 for setting the substrate 10, a head mechanism 40 for connecting the workpiece for observation 30, constituted of a transparent material, to the substrate 10 through resin 50 supplied between the substrate 10 and the workpiece for observation 30 by heating and pressurizing work, light sources 90 for irradiating light against the workpiece 10 put on the stage 20 as well as the objective parts for observation of the workpiece for observation 30 and a photographing means 60 for photographing the image of the objective parts of observation from the side of the workpiece for observation 30 upon connecting the workpiece for observation 30 to the substrate 10 set on the stage 20. PCOPYRIGHT: (C)2008,JPO&INPIT