STATIC ELECTRICITY TESTING DEVICE AND STATIC ELECTRICITY TESTING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a static electricity testing device and testing method considering charge dispersion performance.;SOLUTION: The static electricity testing device comprises an electric source 10 for supplying charges, a first switch for closing a contact A for connecting the electric source 10 and the terminal of the semiconductor device, and a second switch for closing a contact B, wherein after making the semiconductor device electrify with arbitrary amount of charges by closing the contact A of the first switch for making conduct between the electric source 10 and the any other terminal of the semiconductor device, both the contacts A and B are opened for an arbitrary time by the first and the second switches, and after the arbitrary time, the contact B of the second switch is closed, thereby the charges electrifying the semiconductor device are conducted to the ground. Then the performance test of the semiconductor is performed.;COPYRIGHT: (C)2008,JPO&INPIT