PERSPECTIVE IMAGING DEVICE, AND MEASUREMENT METHOD BY PERSPECTIVE IMAGING DEVICE

摘要

PPROBLEM TO BE SOLVED: To provide a perspective imaging device for non-destructively and accurately measuring the dimension of an internal component of a measuring object from a transmission image in a short time. PSOLUTION: The perspective imaging device includes an image reconstitution arithmetic device for forming a plurality of images of the cross-sectional shape of the internal component of the measuring object based on a detected signal of a detection sensor of a radiation beam transmitting through the internal component of the measuring object at a plurality of rotation positions, a two-dimensional image arithmetic device for forming a plurality of two-dimensional images obtained by representing, with pixel values, the images of the internal component of the measuring object formed by the image reconstitution arithmetic device, a three-dimensional image arithmetic device for forming a three-dimensional image by transforming the shape measurement result of the internal component of the measuring object on the two-dimensional images into three-dimensional temporary coordinate system, a shape fitting device for performing fitting by collating the three-dimensional image with the known design data related to the shape of the internal component of the measuring object, and a phase calculation device for calculating the phase of the internal component of the measuring object based on the shape information of the fitted internal component of the measuring object on the three-dimensional temporary coordinate system. PCOPYRIGHT: (C)2008,JPO&INPIT