CONTOUR-SHEAR VIBRATING CHIP, CONTOUR-SHEAR VIBRATION DEVICE AND METHOD OF MANUFACTURING THE CONTOUR-SHEAR VIBRATING CHIP

摘要

PROBLEM TO BE SOLVED: To provide a contour-shear vibrating chip and a contour-shear vibration device in which influence of supporting a vibrating part is reduced, and a method of manufacturing the contour-shear vibrating chip.;SOLUTION: The contour-shear vibrating chip 10 includes a vibrating part 12 which performs contour-shear vibration. When a dimension ratio of a longitudinal side and a lateral side constituting an edge 14 of the vibrating part 12 is changed in the vibrating part 12, the position of a node of vibration is changed, such that the position of the node is set as a support position. In the contour-shear vibrating chip 10, a node can be disposed at the edge 14 of the vibrating part 12 by specifying the dimension ratio. Namely, the support position is located at the edge 14 of the vibrating part 12. At such a time, a supporting part 18 that supports the vibrating part 12 is provided at the support position, and the vibrating part 12 and the support part 18 can be integrally formed.;COPYRIGHT: (C)2008,JPO&INPIT