YIELD MONITORING SYSTEM AND YIELD MONITORING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a yield monitoring system that can be utilized for developing a semiconductor device of high yield.;SOLUTION: A data collecting part 10 collects implementation conditions (design condition, manufacturing condition, test condition and the like), and implementation results (circuit and layout information obtained by design, test results (defective article occurrence rate) and the like), in a design process, and test process as well as a manufacturing process of a semiconductor device. An analyzing part 11, based on the implementation conditions and implementation results that have been collected, analyzes the implementation conditions or combination of them which affects a yield, and outputs the analyzing result.;COPYRIGHT: (C)2008,JPO&INPIT