METHOD FOR FORMING GRAY SCALE ON OBJECT AND MASKLESS LITHOGRAPHY SYSTEM

摘要

PROBLEM TO BE SOLVED: To arrange a large number of gray scale levels in a lighting system without increasing the number of separate pixels in the system.;SOLUTION: In a maskless lithography system having a spatial light modulator (SLM), a method for generating a gray scale on an object comprises: forming a pattern by exposing the object to a light; and forming a gray scale region on the object by modulating an exposure time of the object.;COPYRIGHT: (C)2008,JPO&INPIT