PLASMA RESISTANT SILICON CARBIDE SINTERED COMPACT AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a plasma resistant silicon carbide sintered compact having ≥3.16 kg/cm³ bulk density and a method of stably manufacturing the same.;SOLUTION: The method of manufacturing the plasma resistant silicon carbide sintered compact includes a step for preparing a slurry solution containing silicon carbide powder and a carbon source, a step for obtaining silicon carbide granular powder having ≥89% drying rate from the slurry using a spray drying method, a step for taking out the silicon granular powder having 150-50 μm granular particle diameter distribution from the silicon carbide granular powder and a step for sintering the silicon carbide granular powder using a hot press method.;COPYRIGHT: (C)2008,JPO&INPIT