METHOD FOR MANUFACTURING MAGNETO-RESISTANCE EFFECT TYPE HEAD, MAGNETIC HEAD, AND MAGNETIC RECORDING AND REPRODUCING DEVICE

摘要

PROBLEM TO BE SOLVED: To observe the magnetic domain of a shield film by forming, when a shield film is formed in a thin-film magnetic recording and reproducing head formed on a product wafer, the shield film at a place set as an observation monitor place with a size roughly equal to a finishing size after the formation, and preventing feeding of an undesirable shielding film to a subsequent step, by setting references of the magnetic domain pattern and the magnetic domain magnetization direction of the shielding film, beforehand, and determining the propriety based on the references.;SOLUTION: In the step of forming shield films to hold a magneto-resistance element therebetween, a plurality of monitor shielding films, having shield films substantially equal in size to a finishing size after formation of a shield film are formed on a product wafer; the magnetic domain pattern of the monitor shielding film and the magnetization direction of a magnetic domain are observed by a microscope using a magnetic optical Kerr effect; and the acceptability of the shielding film is determined, based on a predetermined magnetic domain pattern and the magnetization direction of the magnetic domain.;COPYRIGHT: (C)2008,JPO&INPIT