ZnO SELF-SUPPORTED CRYSTAL FILM HAVING HIGH C-AXIS ORIENTATION AND HIGH SPECIFIC SURFACE AREA AND METHOD OF MANUFACTURING THE SAME

摘要

PPROBLEM TO BE SOLVED: To provide a ZnO self-supported crystal film having high c-axis orientation and high specific surface area and a method of manufacturing the same. PSOLUTION: The method of manufacturing an oriented ZnO crystal film using a reaction system in which zinc oxide is precipitated comprises the steps of: adding ethylenediamine or ammonia to the reaction system in which zinc oxide is precipitated, appropriately adjusting temperature and pH of the reaction system, maintaining the reaction system for an appropriate time, standing the reaction system to cool or cooling the reaction system to precipitate zinc oxide to form a self-supported film or a transferable film floating on the liquid surface of the reaction system. Also disclosed are a ZnO self-supported crystal film having high c-axis orientation and high specific surface area and a ZnO device. PCOPYRIGHT: (C)2008,JPO&INPIT