TARGET FOR EXTREME-ULTRAVIOLET LIGHT SOURCE, ITS MANUFACTURING EQUIPMENT, AND EXTREME-ULTRAVIOLET LIGHT SOURCE

摘要

PROBLEM TO BE SOLVED: To provide a target for an extreme-ultraviolet light source which can reduce generation of debris and can be manufactured in parallel with generation of the extreme-ultraviolet light.;SOLUTION: The target 10 for an extreme-ultraviolet light source comprises at least a core material 11 with its top surface composed of a rare gas element solid and a tin-coating 12 formed on the top surface of the core material 11. The target 10 for an extreme-ultraviolet light source can adjust the tin material to the required and sufficient amount, thereby reducing generation of debris. Further, the target 10 for an extreme-ultraviolet light source can be manufactured in such a way that the core material 11 is made by generating the liquid droplet from the rare gas element liquid and solidifying the resultant liquid droplet, then the core material 11 is brought into contact with the gas containing the tin material such as the tin tetrahydride or the like for forming the tin-coating 12. By synchronizing the liquid droplet generation with the cycle of a pulsed laser light irradiated onto the target, the target can be manufactured in parallel with generation of the extreme-ultraviolet light.;COPYRIGHT: (C)2008,JPO&INPIT