TACTILE SENSOR, METHOD OF MANUFACTURING THE TACTILE SENSOR, AND TACTILE SENSOR UNIT

摘要

PPROBLEM TO BE SOLVED: To provide a tactile sensor which detects the magnitude and the direction of external pressure with high sensitivity, and is easily manufactured, and also to provide its manufacturing method and a tactile sensor unit. PSOLUTION: The tactile sensor 100 has a cantilever CL and an elastomer layer 105. The cantilever CL includes a non-doped layer 103a and a doped layer 103b. The lattice constant of the doped layer 103b is smaller than that of the non-doped layer 103a. Accordingly, the cantilever CL is curved. The doped layer 103b is formed by doping boron to a crystalline silicon film. The cantilever CL is deformed by applying the external pressure to the elastomer layer 105. A piezoelectric electrical resistance of the doped layer 103b is varied by deforming of the cantilever CL. Thus, the magnitude and the direction of the external pressure acting on the tactile sensor 100, are detected by detecting the variation in the piezoelectric resistance of the doped layer 103b. PCOPYRIGHT: (C)2008,JPO&INPIT