ELECTRON BEAM SYSTEM FOR MATERIAL PROCESSING, AMPLIFIER FOR CARRYING OUT HIGH-SPEED DRIVE OF INDUCTION ELEMENT, AND IMAGE GENERATING DEVICE FOR ELECTRON BEAM SYSTEM FOR MATERIAL PROCESSING

摘要

PROBLEM TO BE SOLVED: To provide an electron beam system for a material processing, an amplifier for carrying out a high-speed drive of an induction element and an image generating device for an electron beam system for the material processing.;SOLUTION: The amplifier includes a current applying array which carries out a high-speed driving of an induction element, especially, a deflection coil of an electron beam gun, and includes a first voltage node (U₁) matched for connection with a voltage stabilizing power source, a second voltage node (U_v) matched for connection with a first output (AL) for supplying power to the induction element (L) and a plurality of first switchable bridges (B1₁, B1₂, B1₃..., B1_k) each having a resistor (R1₁, R1₂, R1₃..., R1_k) with a resistance value which can be switched continuously between the first voltage node (U₁) and the second voltage node (U_v).;COPYRIGHT: (C)2008,JPO&INPIT