LOW-COHERENCE OPTICAL INTETERFEROMETER AND LOW-COHERENCE OPTICAL INTERFERENCE METHOD USING SAME

摘要

PROBLEM TO BE SOLVED: To provide a low-coherence optical interferometer which can be positioned only by moving an interference optical system for quickly and accurately measuring a face-to-face space without the need for a structure into which a light path compensating plate can be inserted and a structure which transfers the position of a mirror, and to provide a low-coherence optical interference method using the same.;SOLUTION: The interference optical system 2 is arranged so that its focal position corresponds to a first face 60a of an inspected object 60 for interference fringes to be measured by a photoelectric conversion means 70. Then, the interference optical system 2 is moved so that its focal position corresponds to a second face 60b of the inspected object 60 for interference fringes to be measured by the photoelectric conversion means 70. In accordance with the movement distance, a distance between the first face 60a and the second face 60b of the inspected object 60 is measured.;COPYRIGHT: (C)2008,JPO&INPIT