PROBLEM TO BE SOLVED: To obtain a rod-like single crystal having a tip as sharpened as in an atomic level.;SOLUTION: A single crystal tungsten emitter, for example, is treated as follows. First, when a treatment voltage Vr is gradually increased at a high temperature (Tr=2,300°K), a field emission voltage Vext suddenly decreases just after a stage (D) and a 111 top is surrounded by (110) planes. Then the treatment process temperature is gradually lowered to Tr=1,700°K while keeping the voltage. Then, a thermal field treatment by a remolding method is continued while the temperature Tr is kept as low as 1,700°K; and when the FE pattern shows emission of electrons from several atoms at the tip, the treatment is stopped.;COPYRIGHT: (C)2009,JPO&INPIT
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机译:解决的问题:为了获得杆状单晶,其尖端具有与原子水平一样的尖锐度。解决方案:例如,对单晶钨发射体进行如下处理。首先,当治疗电压V r Sub>在高温下(T r Sub> = 2,300°K)逐渐增加时,场发射电压V ext Sub>在阶段(D)之后突然减小,并且<111>顶部被(110)平面包围。然后,在保持电压的同时,将处理过程的温度逐渐降低至T r Sub> = 1,700°K。然后,在保持温度T r Sub>低至1,700°K的同时,继续通过重塑方法进行热处理。当FE模式显示出尖端有多个原子发射电子时,该处理就停止了。;版权所有:(C)2009,日本特许厅&INPIT
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