MICROWAVE PLASMA TREATMENT SYSTEM AND MICROWAVE PLASMA TREATMENT METHOD

摘要

PROBLEM TO BE SOLVED: To provide a microwave plasma treatment system and a microwave plasma treatment method capable of preventing a resin-made container from being locally and thermally deformed during the film deposition without degrading its manufacturing efficiency.;SOLUTION: A microwave propagation tube 15 for surrounding a barrel portion W2 of a resin-made container W over its entire periphery is provided in a treatment device body 11 with a space formed between a side face opposite to the barrel portion W2 of the resin-made container W out of inner faces of the treatment device body 11 and the barrel portion W2 of the resin-made container W, and a microwave propagation coating 15a consisting of a material of high dielectric constant is provided on an outer surface of the microwave propagation tube 15 over its entire circumference.;COPYRIGHT: (C)2008,JPO&INPIT