OPTICAL RECORDING MEDIUM WITH PHASE-CHANGE TYPE OPTICAL DISK PROTECTIVE FILM COMPOSED ESSENTIALLY OF ZINC SULFIDE FORMED BY USING SPUTTERING TARGET COMPOSED ESSENTIALLY OF ZINC SULFIDE

摘要

PROBLEM TO BE SOLVED: To obtain a sputtering target composed essentially of zinc sulfide, capable of reducing particles and nodules produced during sputtering and enhancing mass productivity with reduced variation of quality when a film is deposited by sputtering and having fine crystal grains and high density of ≥90%; to obtain an optical recording medium in which a phase-change type optical disk protective film composed essentially of zinc sulfide is formed by using the target; and to obtain the manufacturing method of the target.;SOLUTION: The refractive index of the film composed essentially of zinc sulfide and containing a conductive oxide can be adjusted in the range of 2.0 to 2.6. In the optical recording medium, the phase-change type optical disk protective film composed essentially of zinc sulfide is formed by using the target.;COPYRIGHT: (C)2008,JPO&INPIT